Thomas Käsebier
at Friedrich-Schiller-Univ Jena
SPIE Involvement:
Author
Publications (20)

Proceedings Article | 26 April 2019
Proc. SPIE. 11031, Integrated Optics: Design, Devices, Systems, and Applications V
KEYWORDS: Short wave infrared radiation, Photodetectors, Mirrors, Germanium, Silicon, Quantum efficiency, Photodiodes, Back illuminated sensors, Absorption

Proceedings Article | 31 October 2016
Proc. SPIE. 10022, Holography, Diffractive Optics, and Applications VII
KEYWORDS: Lithography, Electron beam lithography, Diffraction, Optical design, Electron beams, Silica, X-rays, Photoresist materials, Photomasks, X-ray lithography

Proceedings Article | 31 October 2016
Proc. SPIE. 10022, Holography, Diffractive Optics, and Applications VII
KEYWORDS: Lithography, Electron beam lithography, Diffraction, Antireflective coatings, Glasses, Interfaces, Reflectivity, Near field, Photomasks, Stray light

Proceedings Article | 15 September 2016
Proc. SPIE. 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
KEYWORDS: Mid-IR, Antireflective coatings, Scattering, Etching, Interfaces, Silicon, Coating, Transmittance, Reactive ion etching, Optics manufacturing

Proceedings Article | 21 April 2016
Proc. SPIE. 9884, Nanophotonics VI
KEYWORDS: Gold, Apertures, Lithography, Plasmonics, Nanostructures, Lithographic illumination, Polarization, Reflection, Polymers, Glasses, Chromium, Photomasks, Semiconducting wafers, Nanolithography, Absorption

Showing 5 of 20 publications
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