Thomas Klose
at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | February 19, 2009
Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII
KEYWORDS: Mirrors, Transformers, Sensors, Silicon, Resistance, Micromirrors, Bridges, Position sensors, Piezoresistive sensors, Wheatstone bridges

PROCEEDINGS ARTICLE | February 8, 2008
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Actuators, Mirrors, Silica, Etching, Scanners, Laser scanners, Projection systems, Photomasks, Semiconducting wafers, Prototyping

PROCEEDINGS ARTICLE | January 22, 2007
Proc. SPIE. 6466, MOEMS and Miniaturized Systems VI
KEYWORDS: Microelectromechanical systems, Optical fibers, Mirrors, Imaging systems, Cameras, Scanners, Video, Laser development, Control systems, Semiconductor lasers

PROCEEDINGS ARTICLE | April 21, 2006
Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Modulation, Crystals, Silicon, 3D modeling, Micromirrors, Michelson interferometers, Protactinium

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Mirrors, Electrodes, Crystals, Silicon, Laser scanners, Microopto electromechanical systems, Micromirrors, Optical resolution, Optical simulations, Laser based displays

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Microelectromechanical systems, Mirrors, Microsystems, Data modeling, Electrodes, Electroluminescence, 3D modeling, Capacitance, Finite element methods, Micromirrors

Showing 5 of 7 publications
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