Dr. Thomas J. Markley
Sr. Research Chemist at Air Products and Chemicals Inc
SPIE Involvement:
Publications (4)

Proceedings Article | 4 May 2005 Paper
Thomas Markley, Scott Weigel, Chris Kretz
Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.599989
KEYWORDS: Dielectrics, Lithography, Scanning electron microscopy, Ultraviolet radiation, Polymers, Polymer thin films, Mercury, Silicon, Photomasks, Deep ultraviolet

Proceedings Article | 14 May 2004 Paper
John Marsella, Atteye Abdourazak, Richard Carr, Thomas Markley, Eric Robertson
Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.535613
KEYWORDS: Photoresist materials, Polymers, Absorption, Transparency, Lithography, Absorbance, Industrial chemicals, Chemistry, Etching, Resistance

Proceedings Article | 14 May 2004 Paper
Vladimir Jakubek, Eric Robertson, Atteye Abdourazak, Thomas Markley, John Marsella, Christopher Ober
Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.536586
KEYWORDS: Fluorine, Polymers, Transparency, Etching, Resistance, Lithography, Absorption, Chemical species, Chemically amplified resists, Silicon

Proceedings Article | 12 June 2003 Paper
Peng Zhang, Manuel Jaramillo, Danielle King, Thomas Markley, Zarka Zarkov, David Witko, Ted Paxton, Todd Davis
Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485125
KEYWORDS: Critical dimension metrology, Polymers, Semiconducting wafers, Photoresist developing, Foam, Crystals, Deep ultraviolet, Photoresist materials, Polymer thin films, Scanners

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