Dr. Thomas H. Newman
Sr. Product Marketing Manager at Applied Materials Inc
SPIE Involvement:
Author
Area of Expertise:
Product Management , Key Account Manager , Product Marketing , Lithography
Websites:
Publications (15)

Proceedings Article | 1 November 2007 Paper
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Lithography, Electron beam lithography, Deep ultraviolet, Etching, Reflectivity, Image resolution, Photomasks, Photoresist processing, Binary data, Standards development

Proceedings Article | 30 October 2007 Paper
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Lithography, Deep ultraviolet, Calibration, Spatial light modulators, Photomasks, Acquisition tracking and pointing, Optical proximity correction, Semiconducting wafers, Systems modeling, Model-based design

Proceedings Article | 11 May 2007 Paper
Proc. SPIE. 6607, Photomask and Next-Generation Lithography Mask Technology XIV
KEYWORDS: Lithography, Deep ultraviolet, Calibration, Matrices, Spatial light modulators, Photomasks, Optical proximity correction, Semiconducting wafers, Systems modeling, Model-based design

Proceedings Article | 3 May 2007 Paper
Proc. SPIE. 6533, 23rd European Mask and Lithography Conference
KEYWORDS: Electron beam lithography, Data modeling, Deep ultraviolet, Printing, Spatial light modulators, Photomasks, Convolution, Raster graphics, Critical dimension metrology, Neodymium

Proceedings Article | 20 May 2006 Paper
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Phase shifting, Optical lithography, Deep ultraviolet, Calibration, CCD cameras, Spatial light modulators, Photomasks, Image enhancement, Raster graphics, Neodymium

Showing 5 of 15 publications
Conference Committee Involvement (10)
SPIE Photomask Technology
10 September 2013 | Monterey, California, United States
Photomask Technology
11 September 2012 | Monterey, California, United States
Photomask Technology
19 September 2011 | Monterey, California, United States
Photomask Technology
13 September 2010 | Monterey, California, United States
Photomask Technology
15 September 2009 | Monterey, California, United States
Showing 5 of 10 Conference Committees
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