Prof. Thomas Otto
Acting Director at Fraunhofer-Institute for Electronic Nanosystems
SPIE Involvement:
Publications (24)

Proceedings Article | 13 May 2019
Proc. SPIE. 10982, Micro- and Nanotechnology Sensors, Systems, and Applications XI
KEYWORDS: Silicon, Composites, Transmittance, Switches, Microelectromechanical systems, Infrared radiation, Reflection

Proceedings Article | 4 March 2019
Proc. SPIE. 10931, MOEMS and Miniaturized Systems XVIII
KEYWORDS: Reflectors, Semiconducting wafers, Silicon, Reflectivity, Etching, Refractive index, Transmittance, Microelectromechanical systems, Fabry–Perot interferometers

Proceedings Article | 28 September 2017
Proc. SPIE. 10446, 33rd European Mask and Lithography Conference
KEYWORDS: Reflectors, Nanoimprint lithography, Silicon, Interferometers, Surface enhanced Raman spectroscopy, Nanostructuring, Nanostructures, Electron beam lithography, Photoresist processing

Proceedings Article | 31 August 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Reflectors, Reflectivity, Photonic crystals, Microelectromechanical systems, Nanoimprint lithography, Nanostructuring, Manufacturing, Nanostructures, Interferometers, Microopto electromechanical systems

Proceedings Article | 2 April 2015
Proc. SPIE. 9431, Active and Passive Smart Structures and Integrated Systems 2015
KEYWORDS: Actuators, Transducers, Manufacturing, Chemical elements, Composites, Microfluidics, Foam, Control systems, Wind energy, Wind turbine technology

Showing 5 of 24 publications
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