Prof. Thomas Otto
Acting Director at Fraunhofer-Institute for Electronic Nanosystems
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Author
Publications (22)

PROCEEDINGS ARTICLE | September 28, 2017
Proc. SPIE. 10446, 33rd European Mask and Lithography Conference
KEYWORDS: Reflectors, Nanostructures, Electron beam lithography, Nanostructuring, Interferometers, Silicon, Surface enhanced Raman spectroscopy, Nanoimprint lithography, Photoresist processing

PROCEEDINGS ARTICLE | August 31, 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Microelectromechanical systems, Reflectors, Nanostructures, Nanostructuring, Interferometers, Manufacturing, Reflectivity, Photonic crystals, Microopto electromechanical systems, Nanoimprint lithography

PROCEEDINGS ARTICLE | April 2, 2015
Proc. SPIE. 9431, Active and Passive Smart Structures and Integrated Systems 2015
KEYWORDS: Actuators, Microfluidics, Foam, Composites, Manufacturing, Control systems, Transducers, Wind turbine technology, Wind energy, Chemical elements

PROCEEDINGS ARTICLE | March 10, 2015
Proc. SPIE. 9370, Quantum Sensing and Nanophotonic Devices XII
KEYWORDS: Sensors, Particles, Luminescence, Composites, Zinc, Quantum dots, Aluminum, Nanocrystals, Sensor technology, Quenching (fluorescence)

PROCEEDINGS ARTICLE | March 10, 2014
Proc. SPIE. 9059, Industrial and Commercial Applications of Smart Structures Technologies 2014
KEYWORDS: Actuators, Microfluidics, Resonators, Transducers, Acoustics

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII
KEYWORDS: Microelectromechanical systems, Signal to noise ratio, Mirrors, Sensors, Spectrometers, Infrared spectroscopy, Time metrology, Infrared radiation, Chemical analysis, Diffraction gratings

Showing 5 of 22 publications
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