Thomas Overstolz
at Univ de Neuchâtel
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 21, 2006
Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II
KEYWORDS: Actuators, Oxides, Mirrors, Optical lithography, Interferometers, Electrodes, Adaptive optics, Deep reactive ion etching, Beam shaping, Microtechnology

PROCEEDINGS ARTICLE | August 16, 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Microelectromechanical systems, Actuators, Optical filters, Capacitors, Waveguides, Polarization, Etching, Electrodes, Silicon, Deep reactive ion etching

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