Dr. Thomas Rinder Profile

Dr. Thomas Rinder

at Univ der Bundeswehr Hamburg

SPIE Involvement:

Author

Publications (14)

Proceedings Article | 4 November 2003 Paper

Localization of sub-100-nm particles on wafers with solid state detector arrays

Thomas Rinder, Hendrik Rothe

Proceedings Volume 5188, (2003) https://doi.org/10.1117/12.507440

KEYWORDS: Sensors, Particles, Scatter measurement, Solids, Detector arrays, Light scattering, Mirrors, Semiconducting wafers, Signal to noise ratio, Polarization

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Proceedings Article | 16 October 2003 Paper

Development review of an angle-resolved light scatter (ARS) sensor LARISSA

Thomas Rinder, Hendrik Rothe

Proceedings Volume 5189, (2003) https://doi.org/10.1117/12.505021

KEYWORDS: Sensors, Mirrors, Bidirectional reflectance transmission function, Light scattering, Solids, Autoregressive models, Detector arrays, Scatter measurement, Optical sensors, CMOS sensors

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Proceedings Article | 16 October 2003 Paper

Deducing light scatter from AFM measurements

Cornelius Hahlweg, Thomas Rinder, Peter Thomsen-Schmidt, C. Groh, Hendrik Rothe

Proceedings Volume 5189, (2003) https://doi.org/10.1117/12.505016

KEYWORDS: Light scattering, Atomic force microscopy, Scatter measurement, Scattering, Diffraction gratings, Bidirectional reflectance transmission function, Diffraction, Gold, Dielectrics, Inverse problems

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Proceedings Article | 16 October 2003 Paper

Estimation of performance limits of multipole method using parallel computing techniques

Cornelius Hahlweg, Thomas Rinder, Hendrik Rothe

Proceedings Volume 5189, (2003) https://doi.org/10.1117/12.509479

KEYWORDS: Scattering, Parallel computing, Computing systems, Dielectrics, Atomic force microscopy, Matrices, Particles, Modeling, Software development, Gold

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Proceedings Article | 11 November 2002 Paper

Performance limits of ARS sensor based on CMOS photodiode array

Thomas Rinder, Hendrik Rothe

Proceedings Volume 4779, (2002) https://doi.org/10.1117/12.451738

KEYWORDS: Sensors, Particles, Light scattering, Mirrors, Autoregressive models, Solids, CMOS sensors, Signal to noise ratio, Silicon, Scatter measurement

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Proceedings Article | 22 October 2002 Paper

Modeling of an ARS sensor system in spatial and time domain

Thomas Rinder, Hendrik Rothe

Proceedings Volume 4780, (2002) https://doi.org/10.1117/12.452315

KEYWORDS: Sensors, Mirrors, Light scattering, Autoregressive models, CMOS sensors, Systems modeling, Diodes, Solids, Polarization, Optoelectronics

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Proceedings Article | 10 December 2001 Paper

Measuring the scatter distribution of PSL spheres on Si wafers using a fast calibrated CMOS photodetector array

Thomas Rinder, Hendrik Rothe

Proceedings Volume 4449, (2001) https://doi.org/10.1117/12.450090

KEYWORDS: Sensors, Particles, Light scattering, Semiconducting wafers, Optical spheres, Scatter measurement, Solids, Calibration, Optical testing, Mirrors

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Proceedings Article | 23 October 2001 Paper

Metrological characterization of an ARS sensor based on an elliptical mirror system and a calibrated CMOS photo detector array

Thomas Rinder, Hendrik Rothe

Proceedings Volume 4447, (2001) https://doi.org/10.1117/12.446736

KEYWORDS: Sensors, Particles, Mirrors, Scattering, Light scattering, Frame grabbers, CMOS sensors, Calibration, Scatter measurement, Silicon

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Proceedings Article | 26 September 2000 Paper

Design problems of a calibrated BRDF sensor with respect to dynamic range, speed, and large angle of view

Thomas Rinder, Hendrik Rothe, Andre Kasper

Proceedings Volume 4100, (2000) https://doi.org/10.1117/12.401653

KEYWORDS: Sensors, Mirrors, Particles, Silicon, Spatial frequencies, Bidirectional reflectance transmission function, Calibration, Light scattering, Autoregressive models, Sensor calibration

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Proceedings Article | 26 September 2000 Paper

Polarized light-scattering measurements of polished and etched steel surfaces

Thomas Germer, Thomas Rinder, Hendrik Rothe

Proceedings Volume 4100, (2000) https://doi.org/10.1117/12.401654

KEYWORDS: Light scattering, Scattering, Polarization, Polishing, Spatial frequencies, Atomic force microscopy, Scatter measurement, Dielectric polarization, Surface finishing, Rayleigh scattering

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Proceedings Article | 25 October 1999 Paper

Characterization of surfaces using neural pattern recognition methods based on BRDF and AFM measurements

Thomas Rinder, Hendrik Rothe

Proceedings Volume 3784, (1999) https://doi.org/10.1117/12.366693

KEYWORDS: Principal component analysis, Neural networks, Sensors, Bidirectional reflectance transmission function, Autoregressive models, Neurons, Aluminum, Chlorine, Matrices, Pattern recognition

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Proceedings Article | 25 October 1999 Paper

Derivation of BRDF data from smooth surface topography of large AFM scans: investigation of the influences of surface figures and AFM artifacts

Hendrik Rothe, Dorothee Hueser, Andre Kasper, Thomas Rinder

Proceedings Volume 3784, (1999) https://doi.org/10.1117/12.366697

KEYWORDS: Atomic force microscopy, Bidirectional reflectance transmission function, Sensors, Surface finishing, Stray light, Polishing, Spatial frequencies, Spatial resolution, Optical testing, Light scattering

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Proceedings Article | 29 March 1999 Paper

Investigations of smooth surfaces by measuring the BRDF with a stray light sensor in comparison with PSD curves evaluated from topography of large AFM scans

Hendrik Rothe, Dorothee Hueser, Andre Kasper, Thomas Rinder

Proceedings Volume 3619, (1999) https://doi.org/10.1117/12.343705

KEYWORDS: Sensors, Bidirectional reflectance transmission function, Stray light, Atomic force microscopy, Polishing, Optical testing, Light scattering, Surface finishing, Calibration, Scattering

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Proceedings Article | 30 October 1998 Paper

Comparison of PSD measurements using stray light sensors with PSD curves evaluated from topography of large AFM scans

Dorothee Hueser, Thomas Rinder, Hendrik Rothe

Proceedings Volume 3426, (1998) https://doi.org/10.1117/12.328475

KEYWORDS: Sensors, Stray light, Bidirectional reflectance transmission function, Scattering, Light scattering, Optical testing, Rayleigh scattering, Atomic force microscopy, Specular reflections, Spatial frequencies

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Showing 5 of 14 publications

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