Dr. Thomas C. Roessler
Senior Manager Project Management R&D at
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Lithography, Data modeling, Calibration, Image analysis, Printing, Solids, Optical proximity correction, Semiconducting wafers, Failure analysis, Process modeling

PROCEEDINGS ARTICLE | October 20, 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Semiconductors, Lithography, Metals, Manufacturing, Scanning electron microscopy, Photomasks, Transistors, Optical proximity correction, SRAF, Resolution enhancement technologies

PROCEEDINGS ARTICLE | October 20, 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Lithography, Visualization, Metals, Silicon, Manufacturing, Distance measurement, Photomasks, Optical proximity correction, Computer aided design, Optics manufacturing

PROCEEDINGS ARTICLE | March 14, 2006
Proc. SPIE. 6156, Design and Process Integration for Microelectronic Manufacturing IV
KEYWORDS: Semiconductors, Data modeling, Manufacturing, Design for manufacturing, Optical proximity correction, Product engineering, Electronic design automation, Device simulation, Standards development, Design for manufacturability

PROCEEDINGS ARTICLE | May 5, 2005
Proc. SPIE. 5756, Design and Process Integration for Microelectronic Manufacturing III
KEYWORDS: Logic, Diffusion, Manufacturing, Control systems, Design for manufacturing, Transistors, Optical proximity correction, Critical dimension metrology, Resolution enhancement technologies, Design for manufacturability

PROCEEDINGS ARTICLE | January 27, 2005
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Lithography, Logic, Data modeling, Calibration, Image processing, Scanning electron microscopy, Printing, Photomasks, Optical proximity correction, Process modeling

Showing 5 of 8 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top