Dr. Thomas Schnattinger
at Fraunhofer IISB
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | May 19, 2008
Proc. SPIE. 7028, Photomask and Next-Generation Lithography Mask Technology XV
KEYWORDS: Lithography, Data modeling, Calibration, Scanners, Diffusion, Photoresist materials, Photomasks, Photoresist processing, Semiconducting wafers, Photoresist developing

PROCEEDINGS ARTICLE | April 1, 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Superposition, Lithography, Refractive index, Optical properties, Computer simulations, Nonlinear optics, Photomasks, Double patterning technology, Photoresist processing, Semiconducting wafers

PROCEEDINGS ARTICLE | March 26, 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Polymers, Molecules, Diffusion, Materials processing, Monte Carlo methods, Image quality, Projection systems, Line edge roughness, Photoresist processing, Stochastic processes

PROCEEDINGS ARTICLE | March 27, 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Human-machine interfaces, Lithography, Data modeling, Visualization, Computer programming, Computer simulations, Photoresist materials, Data conversion, C++, Computer programming languages

PROCEEDINGS ARTICLE | November 2, 2004
Proc. SPIE. 5558, Applications of Digital Image Processing XXVII
KEYWORDS: Lithography, Genetic algorithms, Lithographic illumination, Imaging systems, Manufacturing, Photomasks, Critical dimension metrology, Optimization (mathematics), Binary data, Resolution enhancement technologies

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Genetic algorithms, Optical lithography, Lithographic illumination, Manufacturing, Photomasks, Critical dimension metrology, Optimization (mathematics), Binary data, Resolution enhancement technologies

Showing 5 of 6 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top