Dr. Thomas E. Seidel
at Seitek50
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | October 23, 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Titanium dioxide, Quartz, Molecules, Silicon, Optical coatings, Refraction, Photomasks, Optical simulations, Nanoimprint lithography, Fluorine

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Oxides, Quartz, Metals, Silicon, Chemistry, Head, Atomic layer deposition, Photomasks, Nanoimprint lithography, Fluorine

PROCEEDINGS ARTICLE | January 1, 1992
Proc. SPIE. 1594, Process Module Metrology, Control and Clustering
KEYWORDS: Metrology, Contamination, Etching, Metals, Interfaces, Manufacturing, Chemical vapor deposition, Control systems, Process control, Semiconducting wafers

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