Dr. Thomas W. Smith
Professor at Rochester Institute of Technology
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 30, 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Polymethylmethacrylate, Deep ultraviolet, Etching, Polymers, Resistance, Scanning electron microscopy, Photoresist materials, Absorbance, Photoresist developing

PROCEEDINGS ARTICLE | July 28, 2003
Proc. SPIE. 5051, Smart Structures and Materials 2003: Electroactive Polymer Actuators and Devices (EAPAD)
KEYWORDS: Oxides, Refractive index, Potassium, Modulation, Polarization, Polymers, Crystals, Composites, Silicon, Photorefractive polymers

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