Dr. Thomas P. Swiler
at Sandia National Labs
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 14 February 2008
Proc. SPIE. 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
KEYWORDS: Microelectromechanical systems, Packaging, Switches, Silica, Sensors, Silicon, Deep reactive ion etching, Epoxies, Chemical elements, Semiconducting wafers

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