Dr. Thomas Uhrmann
Head of Business Development at EV Group E. Thallner GmbH
SPIE Involvement:
Publications (4)

Proceedings Article | 9 April 2024 Presentation + Paper
K. Varga, M. Weinhart, R. Holly, T. Zenger, B. Považay, F. Bögelsack, A. Spitzer, T. Uhrmann, H. Takishita, Y. Taguchi, J. Koch, M. Schicke
Proceedings Volume 12956, 129560B (2024) https://doi.org/10.1117/12.3010156
KEYWORDS: Optical lithography, Semiconducting wafers, Distortion, RGB color model, Optical alignment, Image sensors, Semiconductors, Metals, Matrices, Sensors

Proceedings Article | 5 October 2023 Paper
Ksenija Varga, Thomas Uhrmann, Roman Holly, Tobias Zenger, Chris Milasincic, Mel Zussman, Ron Legario, Michael Knaus
Proceedings Volume 12802, 128020B (2023) https://doi.org/10.1117/12.2675899
KEYWORDS: Dielectrics, Optical lithography, Film thickness, Advanced packaging, Lithography, Semiconducting wafers, Coating

Proceedings Article | 25 May 2022 Presentation + Paper
Proceedings Volume 12054, 120540B (2022) https://doi.org/10.1117/12.2608176
KEYWORDS: Scanning electron microscopy, Optical lithography, Electroplating, Packaging, Maskless lithography

Proceedings Article | 25 March 2015 Paper
M. Eibelhuber, T. Uhrmann, T. Glinsner
Proceedings Volume 9375, 93750N (2015) https://doi.org/10.1117/12.2084583
KEYWORDS: Photonic crystals, Nanoimprint lithography, Optical alignment, Moire patterns, Lithography, Semiconducting wafers, Crystals, Silicon, Printing, Ultraviolet radiation

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