Dr. Thomas Uhrmann Profile

Dr. Thomas Uhrmann

Head of Business Development at EV Group E. Thallner GmbH

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Author

Publications (4)

Proceedings Article | 9 April 2024 Presentation + Paper

Maskless exposure of die annotations and image sensor patterns employing 7th generation RGB resists

K. Varga, M. Weinhart, R. Holly, T. Zenger, B. Považay, F. Bögelsack, A. Spitzer, T. Uhrmann, H. Takishita, Y. Taguchi, J. Koch, M. Schicke

Proceedings Volume 12956, 129560B (2024) https://doi.org/10.1117/12.3010156

KEYWORDS: Optical lithography, Semiconducting wafers, Distortion, RGB color model, Optical alignment, Image sensors, Semiconductors, Metals, Matrices, Sensors

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Proceedings Article | 5 October 2023 Paper

LITHOSCALE features accomplish dual exposure and high-resolution patterning

Ksenija Varga, Thomas Uhrmann, Roman Holly, Tobias Zenger, Chris Milasincic, Mel Zussman, Ron Legario, Michael Knaus

Proceedings Volume 12802, 128020B (2023) https://doi.org/10.1117/12.2675899

KEYWORDS: Dielectrics, Optical lithography, Film thickness, Advanced packaging, Lithography, Semiconducting wafers, Coating

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Proceedings Article | 25 May 2022 Presentation + Paper

Digitally driven maskless lithography optimized for fine pitch RDL and next generation devices

B. Matuskova Lednicka, T. Uhrmann, B. Považay, R. Holly, F. Bögelsack, T. Zenger, B. Thallner, J. Nakanishi, T. Nishimura

Proceedings Volume 12054, 120540B (2022) https://doi.org/10.1117/12.2608176

KEYWORDS: Scanning electron microscopy, Optical lithography, Electroplating, Packaging, Maskless lithography

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Proceedings Article | 25 March 2015 Paper

CMOS compatible fabrication of 3D photonic crystals by nanoimprint lithography

M. Eibelhuber, T. Uhrmann, T. Glinsner

Proceedings Volume 9375, 93750N (2015) https://doi.org/10.1117/12.2084583

KEYWORDS: Photonic crystals, Nanoimprint lithography, Optical alignment, Moire patterns, Lithography, Semiconducting wafers, Crystals, Silicon, Printing, Ultraviolet radiation

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