Dr. Thor Bakke Profile

Dr. Thor Bakke

CTO at Tunable Infrared technologies As

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Publications (13)

Proceedings Article | 17 March 2015 Paper

A real-time 3D range image sensor based on a novel tip-tilt-piston micromirror and dual frequency phase shifting

Øystein Skotheim, Henrik Schumann-Olsen, Jostein Thorstensen, Anna Kim, Matthieu Lacolle, Karl-Henrik Haugholt, Thor Bakke

Proceedings Volume 9393, 93930A (2015) https://doi.org/10.1117/12.2078976

KEYWORDS: Micromirrors, Mirrors, 3D image processing, Phase shifting, Fringe analysis, 3D acquisition, Clouds, Cameras, Sensors, 3D modeling

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Proceedings Article | 4 May 2010 Paper

High-performance long wave infrared bolometer fabricated by wafer bonding

Adriana Lapadatu, Gjermund Kittilsland, Anders Elfving, Erling Hohler, Terje Kvisterøy, Thor Bakke, Per Ericsson

Proceedings Volume 7660, 766016 (2010) https://doi.org/10.1117/12.852526

KEYWORDS: Semiconducting wafers, Wafer bonding, Readout integrated circuits, Bolometers, Oxides, Copper, Germanium, Staring arrays, Infrared bolometers, Etching

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Proceedings Article | 19 February 2009 Paper

Fabrication of large-scale monocrystalline silicon micro-mirror arrays using adhesive wafer transfer bonding

Fabian Zimmer, Frank Niklaus, Martin Lapisa, Thomas Ludewig, Martin Bring, Martin Friedrichs, Thor Bakke, Harald Schenk, Wouter van der Wijngaart

Proceedings Volume 7208, 720807 (2009) https://doi.org/10.1117/12.808694

KEYWORDS: Silicon, Semiconducting wafers, Mirrors, Micromirrors, Wafer bonding, Adhesives, Oxides, Etching, Electrodes, Metals

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Proceedings Article | 25 April 2008 Paper

Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates

Jan-Uwe Schmidt, Martin Friedrichs, Thor Bakke, Benjamin Voelker, Dirk Rudloff, Hubert Lakner

Proceedings Volume 6993, 69930D (2008) https://doi.org/10.1117/12.787015

KEYWORDS: Mirrors, Actuators, Silicon, Electrodes, Micromirrors, Adhesives, Spatial light modulators, Wafer bonding, Semiconducting wafers, Multilayers

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Proceedings Article | 19 January 2007 Paper

Charging effects in spatial light modulators based on micromirrors

Ulrike Dauderstädt, Thor Bakke, Peter Dürr, Steffen Sinning, Ingo Wullinger, Michael Wagner, Hubert Lakner

Proceedings Volume 6463, 64630J (2007) https://doi.org/10.1117/12.700331

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Oxides, Deep ultraviolet, Micromirrors, Actuators, Titanium, Silicon, Aluminum

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Proceedings Article | 23 January 2006 Paper

Large-scale drift-free monocrystalline silicon micromirror arrays made by wafer bonding

Thor Bakke, Benjamin Völker, Dirk Rudloff, Martin Friedrichs, Harald Schenk, Hubert Lakner

Proceedings Volume 6114, 611402 (2006) https://doi.org/10.1117/12.646182

KEYWORDS: Mirrors, Silicon, Semiconducting wafers, Wafer bonding, Electrodes, Micromirrors, Adhesives, Oxides, Etching, Metals

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Proceedings Article | 22 January 2005 Paper

Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding

Thor Bakke, Martin Friedrichs, Benjamin Voelker, Manfred Reiche, Lars Leonardsson, Harald Schenk, Hubert Lakner

Proceedings Volume 5715, (2005) https://doi.org/10.1117/12.590567

KEYWORDS: Semiconducting wafers, Wafer bonding, Mirrors, Silicon, Adhesives, Electrodes, Polymers, Oxides, Micromirrors, Aluminum

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Proceedings Article | 28 May 2004 Paper

Adiabatic mode converters for photonic integrated circuits and devices

G. Allen Vawter, Thor Bakke, Sayan Mukherjee, Charles Sullivan

Proceedings Volume 5355, (2004) https://doi.org/10.1117/12.525867

KEYWORDS: Waveguides, Polymers, Modulators, Polymer multimode waveguides, Single mode fibers, Transformers, Semiconductors, Photonic integrated circuits, Polymer optical fibers, Oxidation

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Proceedings Article | 30 May 2003 Paper

Integration of polymeric optical waveguides with SOI MEMS structures

Thor Bakke, Charles Sullivan

Proceedings Volume 4997, (2003) https://doi.org/10.1117/12.479462

KEYWORDS: Waveguides, Switches, Polymers, Silicon, Polymer multimode waveguides, Signal attenuation, Cladding, Polarization, Teeth, Microelectromechanical systems

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Proceedings Article | 20 January 2003 Paper

Characterization of spatial light modulators for microlithography

Peter Duerr, Ulrike Dauderstaedt, Detlef Kunze, Marine Auvert, Thor Bakke, Harald Schenk, Hubert Lakner

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.477803

KEYWORDS: Spatial light modulators, Cameras, Lithography, Mirrors, Calibration, Deep ultraviolet, Electrodes, Analog modulation, Reflectivity, Spatial filters

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Proceedings Article | 2 October 2001 Paper

Silicon-on-insulator micromechanical optical switch with postprocessed polymeric waveguides

Thor Bakke, Chris Tigges, Charles Sullivan

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443078

KEYWORDS: Waveguides, Silicon, Optical switching, Polymer multimode waveguides, Polymers, Erbium, Photovoltaics, Microopto electromechanical systems, Switching, Deep reactive ion etching

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Proceedings Article | 28 April 1999 Paper

Active-to-passive element microassembly for photonic microsystems

Sayan Mukherjee, Thor Bakke

Proceedings Volume 3666, (1999) https://doi.org/10.1117/12.347927

KEYWORDS: Silicon, Electronics, Semiconducting wafers, Photonic microstructures, Integrated optics, Waveguides, Wafer-level optics, Optoelectronics, Optical alignment, Vertical cavity surface emitting lasers

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Proceedings Article | 13 April 1999 Paper

Polymeric optical mode converter for hybrid photonic integrated circuits

Thor Bakke, Sayan Mukherjee

Proceedings Volume 3632, (1999) https://doi.org/10.1117/12.344609

KEYWORDS: Waveguides, Polymers, Polymer multimode waveguides, Photonic integrated circuits, Etching, Silicon, Optical fibers, Diffusion, Integrated optics, Waveguide modes

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Showing 5 of 13 publications

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