Dr. Thorsten Winkler
at Qimonda AG i IN
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 12, 2004
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Optical lithography, Lithographic illumination, Metals, Photomasks, Optical proximity correction, Semiconducting wafers

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