KEYWORDS: Gallium nitride, Temperature metrology, Luminescence, Diffusion, Visualization, Spatial resolution, Scanning electron microscopy, Line scan image sensors, Excitons, Electron microscopes
A lateral p+n GaN junction with a 10 µm drift layer has been characterized by combined Cathodoluminescence (CL) and Electron-Beam-Induced Current (EBIC) measurements performed at different temperatures. A vertical CL linescan across the pn-junction shows the evolution of luminescence in growth direction. The distinct changes of local emission in the space charge region are correlated with temperature dependent EBIC profiles. In particular in the drift zone, a mono-exponential behavior with a large characteristic length was observed. These profiles are correlated to the calculated band profiles for quantifying the evolution of electrical fields in the space charge region and drift zone.
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