In this paper, a novel direct writing technique using micro- and nanofiber pens is presented. The micro- and nanofiber
pen serves as a tightly confined point source and it adopts micro touch mode in the process of writing. The energy
distribution of direct writing model is analyzed by Three-Dimension Finite-Difference Time-Domain method. The lines
with feature sizes down to 100 nm are experimentally achieved by this technique. Experiments also demonstrate that
direct writing using micro- and nanofiber pens has some advantages: simple process, large writing area, and controllable
width of lines. In addition, by altering writing direction of lines, complex submicron patterns can be fabricated.