Optical antennas are essential components for integrated photonic circuits (PICs) as they allow the effective coupling of light into/from free space with large optical aperture and therefore small divergence angle. Such a function is especially vital in sensing applications such as LIDAR and Doppler velocimetry where the interaction with free space objects is required. However, the design of a linear grating optical antenna is not a trivial task, as the radiation intensity and angle need to be optimized along the antenna length to achieve the desired radiation pattern. In this work, we proposed and realized an automated design scheme for silicon PIC antennas. Utilizing such a scheme, an optical antenna array with 128 μm by 500 μm optical aperture has been designed and fabricated with 0.18 μm fabrication technology. The antenna has been characterized for its divergence angle and radiation pattern. The obtained data match well with design parameters, showing the viability of such an automated design scheme.
Subwavelength grating (SWG) structures can greatly improve the design flexibility of silicon photonic integrated circuits. Most SWG structures reported in the literature so far are fabricated with electron beam lithography, limiting their use in mass production. In this work, a study has been carried out for the SWG waveguide and coupling structures that are compatible with 0.18 μm CMOS process. The optical propagation in this SWG waveguide has been analyzed, and the loss of coupling structures between solid silicon waveguide and SWG waveguide have been studied through simulation and measurement. The overall results show a potential of the design and fabrication of SWG waveguides with 0.18 μm CMOS process.
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