Tianyue Yu
Graduate Research Assistant at Cornell Univ
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 29 December 2003
Proc. SPIE. 5347, Micromachining Technology for Micro-Optics and Nano-Optics II
KEYWORDS: Microfabrication, Molecules, Absorption, Polymerization, Chemically amplified resists, Chromophores, Chemistry, Lithography, Optical lithography, 3D image processing

Proceedings Article | 4 November 2002
Proc. SPIE. 4809, Nanoscale Optics and Applications
KEYWORDS: Polymerization, Microfabrication, Absorption, Molecules, Chromophores, Solids, Luminescence, Laser damage threshold, Quantum efficiency, Microelectromechanical systems

Proceedings Article | 24 July 2002
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Optical lithography, Polymers, Microfabrication, Photomasks, Biosensors, Polymerization, Atomic force microscopy, Thin films, Diffraction, Lithography

Proceedings Article | 24 August 2001
Proc. SPIE. 4345, Advances in Resist Technology and Processing XVIII
KEYWORDS: Etching, Polymers, Reactive ion etching, Plasma, Dry etching, Photoresist processing, Plasma etching, Ions, Resistance, Semiconductors

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top