Dr. Tilman Glaser
at Carl Zeiss Jena GmbH
SPIE Involvement:
Publications (8)

Proceedings Article | 21 June 2019 Paper
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Scattering, Light scattering, Bidirectional reflectance transmission function, Diffraction gratings

SPIE Journal Paper | 24 May 2019
OE Vol. 58 Issue 09
KEYWORDS: Etching, Diffraction gratings, Ions, Diffraction, Ion beams, Reactive ion etching, Refractive index, Photoresist materials, Silica, Oxygen

Proceedings Article | 28 May 2018 Paper
Proc. SPIE. 10694, Computational Optics II
KEYWORDS: Diffraction, Refractive index, Optical design, Multilayers, Reflection, Dielectrics, Tantalum, Optimization (mathematics), Tolerancing, Diffraction gratings

Proceedings Article | 16 October 2017 Paper
Proc. SPIE. 10448, Optifab 2017
KEYWORDS: Lithography, Holography, Manufacturing, Humidity, Laser stabilization, Laser optics, Optics manufacturing, Atmospheric optics, Temperature metrology, Diffraction gratings

Proceedings Article | 18 June 2007 Paper
Proc. SPIE. 6617, Modeling Aspects in Optical Metrology
KEYWORDS: Gold, Optical spheres, Scattering, Metals, Particles, Dielectrics, Interfaces, Silver, Light scattering, Absorption

Showing 5 of 8 publications
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