Tim Käseberg
at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 April 2020 Presentation
Proc. SPIE. 11352, Optics and Photonics for Advanced Dimensional Metrology
KEYWORDS: Nanotechnology, Ellipsometry, Microscopes, Plasmonics, Nanostructures, Visible radiation, Metrology, Polarization, Lens design, Near field optics

Proceedings Article | 21 June 2019 Presentation + Paper
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Ellipsometry, Plasmonics, Nanostructures, Metrology, Numerical simulations, Scanning electron microscopy, Near field optics

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