Prof. Timothy J. Hogan
SMT
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 January 2005
Proc. SPIE. 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
KEYWORDS: Mirrors, Diffractive optical elements, Error analysis, Manufacturing, Computer programming, Process control, Projection systems, Digital micromirror devices, Digital Light Processing, Design for manufacturability

Proceedings Article | 16 January 2003
Proc. SPIE. 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II
KEYWORDS: Microelectromechanical systems, Semiconductors, Mirrors, Particles, Manufacturing, Reliability, Projection systems, Micromirrors, Digital micromirror devices, Digital Light Processing

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