Dr. Timothy Kehoe
Optical Engineer at IRIS Ireland
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 18 March 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Metrology, Polymethylmethacrylate, Polymers, Interfaces, Silicon, Nanoimprint lithography, Photoacoustic spectroscopy, Head-mounted displays, Acoustics, Polymer thin films

Proceedings Article | 20 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Diffraction, Metrology, Polymethylmethacrylate, Polymers, Silicon, Aluminum, Nanoimprint lithography, Photoacoustic spectroscopy, Semiconducting wafers, Diffraction gratings

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top