Prof. Timothy A. Shedd
Assistant Professor at Univ of Wisconsin Madison
SPIE Involvement:
Author
Publications (12)

SPIE Journal Paper | 1 July 2008
JM3 Vol. 7 Issue 03
KEYWORDS: Liquids, Data modeling, Fluid dynamics, Thin films, Water, Semiconducting wafers, Microfluidics, Immersion lithography, Quartz, Velocity measurements

Proceedings Article | 3 May 2007
Proc. SPIE. 6533, 23rd European Mask and Lithography Conference
KEYWORDS: Thin films, Data modeling, Cameras, Water, Particles, High speed cameras, Immersion lithography, Semiconducting wafers, Fluid dynamics, Liquids

SPIE Journal Paper | 1 April 2007
JM3 Vol. 6 Issue 02
KEYWORDS: Liquids, Velocity measurements, Fluid dynamics, Capillaries, Image processing, Data modeling, Interfaces, Semiconducting wafers, Chromium, Microfluidics

Proceedings Article | 20 October 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Semiconductors, Microfluidics, Data modeling, Capillaries, Interfaces, Solids, Immersion lithography, Semiconducting wafers, Fluid dynamics, Liquids

Proceedings Article | 21 June 2006
Proc. SPIE. 6281, 22nd European Mask and Lithography Conference
KEYWORDS: Optical lithography, Capillaries, Image processing, Interfaces, Immersion lithography, Velocity measurements, Semiconducting wafers, Wafer testing, Fluid dynamics, Liquids

Proceedings Article | 11 April 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Polymers, Fourier transforms, Photoresist materials, Line width roughness, Immersion lithography, Line edge roughness, Thin film coatings, Photoresist processing, Semiconducting wafers

Showing 5 of 12 publications
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