Ting-Yu Lee
at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | June 12, 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Transparency, Polymers, Spectrometers, Photoresist materials, Polymerization, Absorbance, Synchrotron radiation, Vacuum ultraviolet, Absorption

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top