Dr. Ting Xie Profile

Dr. Ting Xie

at Mattson Technology Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 1 May 2023 Presentation + Paper

Qi Zhang, Haichun Yang, Yueh-ling Hsieh, Jiajun Chen, Jiaying Yang, Ting Xie, Shanyu Wang, Hua Chung

Proceedings Volume 12499, 124990D (2023) https://doi.org/10.1117/12.2662532

KEYWORDS: Etching, Plasma

Proceedings Article | 25 March 2019 Paper

Qi Zhang, Haochen Li, Xinliang Lu, Ting Xie, Hua Chung, Shawming Ma, Michael Yang

Proceedings Volume 10960, 1096026 (2019) https://doi.org/10.1117/12.2521136

KEYWORDS: Silicon, Etching, Oxides, Semiconducting wafers, Amorphous silicon, Plasma, HF etching, Lithography, Dielectrics, FT-IR spectroscopy

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