Prof. Tino Hausotte Profile

Prof. Tino Hausotte

Professor at Friedrich-Alexander-Univ. Erlangen-Nürnberg

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Author

Publications (21)

Proceedings Article | 15 August 2023 Presentation + Paper

Investigations on the accuracy and evaluation of the uncertainty of stitching in optical surface metrology

Janik Schaude, Tino Hausotte

Proceedings Volume 12618, 1261813 (2023) https://doi.org/10.1117/12.2669490

KEYWORDS: Metrology, Measurement uncertainty, Optical surfaces, Monte Carlo methods, Image registration, Interpolation, Equipment, Sensors, Phase shifts, Optical scanning systems

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Proceedings Article | 18 May 2020 Paper

Extension of the registration possibilities and determination of the positioning precision of a multi-scale fringe projection system

Sebastian Metzner, Tino Hausotte

Proceedings Volume 11397, 1139703 (2020) https://doi.org/10.1117/12.2558029

KEYWORDS: Cameras, Projection systems, Image registration, Data fusion, Interferometers, Sensor calibration

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Proceedings Article | 21 June 2019 Paper

Evaluation of the optical performance of a novel high-speed focal-distance-modulated fibre-coupled confocal sensor

Andreas Gröschl, Janik Schaude, Tino Hausotte

Proceedings Volume 11056, 110560N (2019) https://doi.org/10.1117/12.2526038

KEYWORDS: Confocal microscopy, Sensors, Signal processing, Modulation, Objectives, Curium, Optical amplifiers, Microscopes, Image sensors, Gradient-index optics

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Proceedings Article | 21 June 2019 Paper

Automatic camera calibration and sensor registration of a multi-sensor fringe measurement system using hexapod positioning

Sebastian Metzner, Tino Hausotte

Proceedings Volume 11056, 1105616 (2019) https://doi.org/10.1117/12.2526122

KEYWORDS: Calibration, Speckle pattern, Image registration, Optical flow, Feature extraction

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Proceedings Article | 8 November 2018 Paper

Holistic dimensional measurement of sheet-bulk metal formed parts

Sebastian Metzner, Tino Hausotte

Proceedings Volume 10819, 108190W (2018) https://doi.org/10.1117/12.2501255

KEYWORDS: Sensors, Calibration, Metals, Projection systems, Manufacturing, Cameras

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Proceedings Article | 24 May 2018 Paper

Interferometric measuring systems of nanopositioning and nanomeasuring machines

Tino Hausotte

Proceedings Volume 10678, 106780Q (2018) https://doi.org/10.1117/12.2318309

KEYWORDS: Interferometry

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Proceedings Article | 27 May 2011 Paper

Multisensor technology based on a laser focus probe for nanomeasuring applications over large areas

Eberhard Manske, Gerd Jäger, Tino Hausotte, Torsten Machleidt

Proceedings Volume 8082, 808203 (2011) https://doi.org/10.1117/12.888445

KEYWORDS: Sensors, Laser beam diagnostics, Microscopes, Objectives, Atomic force microscopy, CCD cameras, Laser applications, Collimators, Nanostructures, Metrology

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Proceedings Article | 13 May 2011 Paper

Integration of CMM software standards for nanopositioning and nanomeasuring machines

E. Sparrer, T. Machleidt, T. Hausotte, E. Manske, K.-H. Franke

Proceedings Volume 8031, 80312G (2011) https://doi.org/10.1117/12.882822

KEYWORDS: Human-machine interfaces, Metrology, Data processing, Inspection, Computer programming, Computer architecture, Calibration, MATLAB, Sensors, Measurement devices

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Proceedings Article | 25 August 2010 Paper

Investigation of the metrological properties of a 3-D microprobe with optical detection system

F. Balzer, N. Hofmann, N. Dorozhovets, T. Hausotte, E. Manske, G. Jäger

Proceedings Volume 7767, 77670V (2010) https://doi.org/10.1117/12.863118

KEYWORDS: Interferometers, Metrology, Optical spheres, Head, Silicon, 3D metrology, Sensors, Beam splitters, Interferometry, Optical components

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Proceedings Article | 18 June 2007 Paper

Application of the metrological scanning probe microscope for high-precision, long-range, traceable measurements

N. Dorozhovets, T. Hausotte, G. Jäger, E. Manske

Proceedings Volume 6616, 661624 (2007) https://doi.org/10.1117/12.726230

KEYWORDS: Metrology, Scanning probe microscopy, Standards development, Calibration, Scanning probe microscopes, Interferometers, Homodyne detection, Atomic force microscopy, Piezoelectric drives, Mirrors

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Proceedings Article | 18 June 2007 Paper

Precision mechatronics based on high-precision measuring and positioning systems and machines

Gerd Jäger, Eberhard Manske, Tino Hausotte, Rostyslav Mastylo, Natalja Dorozhovets, Norbert Hofmann

Proceedings Volume 6616, 661621 (2007) https://doi.org/10.1117/12.732041

KEYWORDS: Interferometers, Mirrors, Sensors, Metrology, Mechatronics, Nanoprobes, Helium neon lasers, Optical testing, Spatial resolution, Atomic force microscopy

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Proceedings Article | 25 October 2006 Paper

Nanomeasuring and nanopositioning engineering

G. Jäger, T. Hausotte, E. Manske, H.-J. Büchner, R. Mastylo, N. Dorozhovets, N. Hofmann

Proceedings Volume 6280, 628001 (2006) https://doi.org/10.1117/12.715237

KEYWORDS: Interferometers, Mirrors, Sensors, Metrology, Atomic force microscopy, Sensor technology, Nanoprobes, Microscopes, Spatial resolution, Optical testing

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Proceedings Article | 14 August 2006 Paper

Development of the interferometrical scanning probe microscope

N. Dorozhovets, T. Hausotte, N. Hofmann, E. Manske, G. Jäger

Proceedings Volume 6293, 629311 (2006) https://doi.org/10.1117/12.680692

KEYWORDS: Scanning probe microscopy, Interferometry, Interferometers, Metrology, Atomic force microscopy, Calibration, Piezoelectric drives, Scanning probe microscopes, Control systems, Beam splitters

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Proceedings Article | 14 August 2006 Paper

A new traceable method for determination of periodic nonlinearities of interferometers

I. Schmidt, G. Jäger, T. Hausotte, E. Manske, R. Füßl

Proceedings Volume 6292, 629206 (2006) https://doi.org/10.1117/12.680613

KEYWORDS: Interferometers, Mirrors, Motion measurement, Calibration, Demodulation, Control systems, Sensors, Motion analysis, Laser stabilization, Time metrology

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Proceedings Article | 27 April 2006 Paper

Metrological scanning probe microscope

N. Dorozhovets, T. Hausotte, E. Manske, G. Jäger, N. Hofmann

Proceedings Volume 6188, 61880L (2006) https://doi.org/10.1117/12.664407

KEYWORDS: Scanning probe microscopy, Metrology, Interferometers, Atomic force microscopy, Scanning probe microscopes, Piezoelectric drives, Actuators, Control systems, Beam splitters, Microscopes

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Proceedings Article | 24 March 2006 Paper

Long-range nanopositioning and nanomeasuring machine for application to micro- and nanotechnology

Gerd Jäger, Tino Hausotte, Hans-Joachim Büchner, Eberhard Manske, Ingomar Schmidt, Rostyslav Mastylo

Proceedings Volume 6152, 615224 (2006) https://doi.org/10.1117/12.655156

KEYWORDS: Interferometers, Mirrors, Sensors, Metrology, Atomic force microscopy, Optical testing, Sensor technology, Microscopes, Spatial resolution, Nanotechnology

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Proceedings Article | 20 October 2005 Paper

Nanopositioning and nanomeasuring machine for high accuracy measuring procedures of small features in large areas

E. Manske, T. Hausotte, R. Mastylo, N. Hofmann, G. Jäger

Proceedings Volume 5965, 596509 (2005) https://doi.org/10.1117/12.624791

KEYWORDS: Sensors, Mirrors, Interferometers, Microscopes, Calibration, Holograms, Diffraction, Sensor technology, Integrated optics, Metrology

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Proceedings Article | 31 August 2005 Paper

Application of a positioning and measuring machine for metrological long-range scanning force microscopy

T. Hausotte, G. Jaeger, E. Manske, N. Hofmann, N. Dorozhovets

Proceedings Volume 5878, 587802 (2005) https://doi.org/10.1117/12.620882

KEYWORDS: Atomic force microscopy, Sensors, Interferometers, Calibration, Motion measurement, Head, Metrology, Standards development, Mirrors, Actuators

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Proceedings Article | 14 February 2005 Paper

Integration of probe systems in a nanopositioning and nanomeasuring machine

Gerd Jaeger, Eberhard Manske, Tino Hausotte, Rostyslav Mastylo, Hans-Joachim Buechner, Rainer Gruenwald, Roland Fussl

Proceedings Volume 5776, (2005) https://doi.org/10.1117/12.611848

KEYWORDS: Sensors, Mirrors, Interferometers, System integration, Sensor technology, Calibration, Scanning probe microscopy, Photomasks, Wafer inspection, Metrology

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Proceedings Article | 20 November 2003 Paper

Miniature interferometers for applications in microtechnology and nanotechnology

Gerd Jager, Eberhard Manske, Tino Hausotte, Roland Fußl, Rainer Grunwald, Hans Buchner, Walter Schott, Denys Dontsov

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.507906

KEYWORDS: Interferometers, Retroreflectors, Sensors, Microscopes, Metrology, Microtechnology, Nanotechnology, Interferometry, Fiber optics, Waveguides

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Proceedings Article | 29 July 2002 Paper

Nanopositioning and measuring technique

Gerd Jaeger, Eberhard Manske, Tino Hausotte, Hans-Joachim Buechner, Rainer Gruenwald

Proceedings Volume 4900, (2002) https://doi.org/10.1117/12.484563

KEYWORDS: Mirrors, Microscopes, Sensors, Interferometers, Zerodur, Nanotechnology, Metrology, Laser systems engineering, Sensor technology, Manufacturing

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Showing 5 of 21 publications

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