Tobias Grunewald
at Physikalisch-Technische Bundesanstalt (PTB)
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 July 2019
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Ellipsometry, Statistical analysis, Polarization, Error analysis, Computer simulations, Optical testing, Inverse problems, Spectroscopic ellipsometry, Inverse optics, Maxwell's equations

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