Toby Hallam
at Univ of New South Wales
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 28, 2005
Proc. SPIE. 5649, Smart Structures, Devices, and Systems II
KEYWORDS: Lithography, Optical lithography, Chemical species, Silicon, Hydrogen, Scanning probe microscopy, Phosphorus, Electron transport, Scanning tunneling microscopy, Quantum computing

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Lithography, Chemical species, Molecules, Silicon, Hydrogen, Control systems, Adsorption, Phosphorus, Scanning tunneling microscopy, Quantum computing

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top