Tod Evan Robinson
Research & Development Engineer at RAVE LLC
SPIE Involvement:
Author
Publications (36)

Proceedings Article | 20 September 2020 Presentation
Proc. SPIE. 11518, Photomask Technology 2020
KEYWORDS: Nanotechnology, Edge detection, Photomasks, Edge roughness

Proceedings Article | 20 September 2020 Presentation
Proc. SPIE. 11518, Photomask Technology 2020
KEYWORDS: Carbon, Diffractive optical elements, Data modeling, Deep ultraviolet, Ultraviolet radiation, Hydrogen, Laser processing, Inspection, Photomasks, Extreme ultraviolet lithography

Proceedings Article | 20 September 2020 Poster + Presentation
Proc. SPIE. 11518, Photomask Technology 2020
KEYWORDS: Chemistry, Extreme ultraviolet, Molecular machines

Proceedings Article | 27 June 2019 Paper
Proc. SPIE. 11178, Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Multilayers, Metrology, Contamination, Deep ultraviolet, Quartz, Laser energy, Particles, Laser processing, Atomic force microscopy, Femtosecond lasers, Photomasks, Extreme ultraviolet, Particle contamination, Mask cleaning

Proceedings Article | 3 October 2018 Presentation + Paper
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Deep ultraviolet, Quartz, Particles, Laser processing, Laser development, Atomic force microscopy, Photomasks, Extreme ultraviolet, Pulsed laser operation

Showing 5 of 36 publications
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