Dr. Todd R. Younkin
Sr. Staff Research Scientist at Intel Corporation
SPIE Involvement:
Conference Co-Chair | Conference Program Committee | Editor | Author
Publications (41)

SPIE Conference Volume | 6 June 2016

Proceedings Article | 20 March 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Polymethylmethacrylate, Etching, Dry etching, Annealing, Scanning electron microscopy, Photoresist materials, Directed self assembly, Wet etching, Picosecond phenomena, Photoresist developing

Proceedings Article | 17 April 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: FT-IR spectroscopy, Optical lithography, Nanoparticles, Metals, Spectroscopy, Ultraviolet radiation, Particles, Scanning electron microscopy, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 28 March 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Polymethylmethacrylate, Etching, Polymers, Resistance, Fourier transforms, Chemical vapor deposition, Directed self assembly, Picosecond phenomena, Semiconducting wafers

Proceedings Article | 1 April 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Lithography, Metrology, Scanners, Computer simulations, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Nanoimprint lithography, Photoresist processing, Stochastic processes

Showing 5 of 41 publications
Conference Committee Involvement (9)
Advances in Patterning Materials and Processes XXXIII
29 February 2016 | San Jose, California, United States
Alternative Lithographic Technologies VIII
22 February 2016 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXII
24 February 2015 | San Jose, California, United States
Alternative Lithographic Technologies VII
23 February 2015 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXI
24 February 2014 | San Jose, California, United States
Showing 5 of 9 Conference Committees
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