Prof. Toh-Ming Lu
at Rensselaer Polytechnic Institute
SPIE Involvement:
Author
Publications (10)

PROCEEDINGS ARTICLE | April 1, 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Multilayers, Particles, 3D modeling, Atomic force microscopy, Monte Carlo methods, Photomasks, Extreme ultraviolet, Optical simulations, Extreme ultraviolet lithography, Scanning transmission electron microscopy

PROCEEDINGS ARTICLE | September 10, 2008
Proc. SPIE. 7041, Nanostructured Thin Films
KEYWORDS: Thin films, Diffraction, Nanostructuring, Reflection, Sensors, Chemical species, Crystals, X-rays, Diffusion, Nanorods

PROCEEDINGS ARTICLE | March 31, 2006
Proc. SPIE. 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Nanostructures, Nanostructuring, Electrodes, Nickel, Hydrogen, Resistance, Ruthenium, Nanolithography, Hydrogen production, Nanorods

PROCEEDINGS ARTICLE | May 16, 2005
Proc. SPIE. 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Nanostructuring, Argon, Chemical species, Electrodes, Tungsten, Ions, Gases, Silver, Ionization, Nanorods

PROCEEDINGS ARTICLE | October 27, 2003
Proc. SPIE. 5219, Nanotubes and Nanowires
KEYWORDS: Fabrication, Thin films, Nanostructures, Multilayers, Particles, Silicon, Scanning electron microscopy, Nanolithography, Nanorods, Nanowires

PROCEEDINGS ARTICLE | October 6, 2003
Proc. SPIE. 9663, Eighth International Topical Meeting on Education and Training in Optics and Photonics
KEYWORDS: Electronics, Foam, Defect detection, Spectroscopy, Physics, Imaging spectroscopy, Tomography, Terahertz radiation, Molecular electronics, Plasma

Showing 5 of 10 publications
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