Dr. Tohru Kawamura Profile

Dr. Tohru Kawamura

at Osaka Univ

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Author

Publications (5)

PROCEEDINGS ARTICLE | September 20, 2004

Simulations on laser ablation and its applications

Proc. SPIE. 5448, High-Power Laser Ablation V

KEYWORDS: Chemical species, Particles, Electrons, Ions, Laser ablation, Extreme ultraviolet, Optical simulations, Plasma, Liquids, Absorption

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PROCEEDINGS ARTICLE | May 20, 2004

Estimation of emission efficiency for laser-produced EUV plasmas

Proc. SPIE. 5374, Emerging Lithographic Technologies VIII

KEYWORDS: Opacity, X-rays, Electrons, Ions, Plasmas, Laser development, Solids, Extreme ultraviolet, Pulsed laser operation, Tin

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PROCEEDINGS ARTICLE | May 20, 2004

Theoretical simulation of extreme UV radiation source for lithography

Proc. SPIE. 5374, Emerging Lithographic Technologies VIII

KEYWORDS: Lithography, Opacity, Ultraviolet radiation, Electrons, Ions, Plasmas, Xenon, Solids, Extreme ultraviolet, Tin

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PROCEEDINGS ARTICLE | May 20, 2004

Properties of EUV emissions from laserproduced tin plasmas

Proc. SPIE. 5374, Emerging Lithographic Technologies VIII

KEYWORDS: Lithography, Calibration, Spectroscopy, Laser energy, Plasmas, Laser applications, Extreme ultraviolet, Grazing incidence, Spherical lenses, Tin

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PROCEEDINGS ARTICLE | January 11, 2000

X-ray spectroscopic analysis of the influence of low-modal nonuniformity on the formation of a hot spark

Proc. SPIE. 3886, High-Power Lasers in Energy Engineering

KEYWORDS: Spectrum analysis, Argon, Spectroscopy, X-rays, Diagnostics, Laser irradiation, Picosecond phenomena, X-ray imaging, Plasma, Fusion energy

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