Dr. Tokuyuki Honda
Manager at Canon USA Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (17)

PROCEEDINGS ARTICLE | February 15, 2017
Proc. SPIE. 10040, Endoscopic Microscopy XII
KEYWORDS: Endoscopy, Optical components, Diffraction, Optical design, Reflection, Surgery, Imaging systems, Spectroscopy, Endoscopes, Image processing software, Neodymium, Diffraction gratings

SPIE Journal Paper | July 1, 2009
JM3 Vol. 8 Issue 03
KEYWORDS: Fourier transforms, Linear filtering, Image transmission, Resolution enhancement technologies, Computer simulations, Phase shifting, Photomasks, Binary data, Coherence imaging, Lithography

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Carbon, Mirrors, Polishing, Projection systems, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Nanoimprint lithography, Critical dimension metrology, Protactinium

SPIE Journal Paper | January 1, 2009
JM3 Vol. 8 Issue 01
KEYWORDS: Diffusion, Modulation transfer functions, Photoresist materials, Polymers, Immersion lithography, Interferometry, Lithography, Image resolution, Optical simulations, Optical lithography

PROCEEDINGS ARTICLE | May 19, 2008
Proc. SPIE. 7028, Photomask and Next-Generation Lithography Mask Technology XV
KEYWORDS: Curium, Calcium, Computer simulations, Scanning electron microscopy, Printing, Photomasks, Optical proximity correction, Semiconducting wafers, Model-based design, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Mirrors, Interferometers, Wavefronts, Optical testing, Projection systems, Extreme ultraviolet, Optics manufacturing, EUV optics, Wavefront metrology, Diffusion tensor imaging

Showing 5 of 17 publications
Conference Committee Involvement (3)
SPIE Lithography Asia - Korea
13 October 2010 | n/a, Republic of Korea
SPIE Lithography Asia - Taiwan
18 November 2009 | Taipei, Taiwan
SPIE Lithography Asia - Taiwan
4 November 2008 | Taipei, Taiwan
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