Mr. Tom P. Courtney Profile

Tom P. Courtney

Systems Engineering Manager at QED Optics

SPIE Involvement:

Author

Publications (2)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 19 August 2005 Paper

Cycle time and cost reduction in large-size optics production

Bob Hallock, Aric Shorey, Tom Courtney

Proceedings Volume 5869, 58690D (2005) https://doi.org/10.1117/12.617779

KEYWORDS: Polishing, Magnetorheological finishing, Surface finishing, Optics manufacturing, Mirrors, Abrasives, Glasses, Aspheric lenses, Optical fabrication, Lightweight mirrors

Read Abstract +

Optical fabrication process steps have remained largely unchanged for decades. Raw glass blanks have been rough-machined, generated to near net shape, loose abrasive or fine bound diamond ground and then polished. This set of processes is sequential and each subsequent operation removes the damage and micro cracking induced by the prior operational step. One of the long-lead aspects of this process has been the glass polishing. Primarily, this has been driven by the need to remove relatively large volumes of glass material compared to the polishing removal rate to ensure complete damage removal. The secondary time driver has been poor convergence to final figure and the corresponding polish-metrology cycles. The overall cycle time and resultant cost due to labor, equipment utilization and shop efficiency is increased, often significantly, when the optical prescription is aspheric. In addition to the long polishing cycle times, the duration of the polishing time is often very difficult to predict given that current polishing processes are not deterministic processes. This paper will describe a novel approach to large optics finishing, relying on several innovative technologies to be presented and illustrated through a variety of examples. The cycle time reductions enabled by this approach promises to result in significant cost and lead-time reductions for large size optics. In addition, corresponding increases in throughput will provide for less capital expenditure per square meter of optic produced. This process, comparative cycles time estimates and preliminary results will be discussed.

Proceedings Article | 13 January 2004 Paper

Fabrication of EUV components with MRF

Paul Murphy, James Mooney, Thomas Courtney

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.506274

KEYWORDS: Magnetorheological finishing, Polishing, Photomasks, EUV optics, Semiconducting wafers, Surface finishing, Extreme ultraviolet, Lithography, Silicon, Photovoltaics

Read Abstract +

Magneto-rheological finishing (MRF) is a deterministic figuring process capable of quickly achieving extreme surface accuracies. The commercially available Q22 has been instrumental in the manufacture of DUV lithography optics to better than 30 nm P-V figure and 1.0 nm rms microroughness. The requirements for EUV optics, photomask substrates, and silicon-on-insulator (SOI) wafers, however, have taken "extreme accuracy" to new levels. Surface quality is specified over a broad range of spatial frequencies, and allowable error magnitudes shrink ever smaller. These specifications expose some limitations of sub-aperture tool technologies. MRF capabilities, recent developments, and future system improvements that address these concerns are described. We present polishing results on photomasks that pass flatness requirements until year 2010. We further demonstrate extreme precision figure correction capability on SOI wafers, achieving thickness uniformity of better than 2 nm PV and 0.3 nm rms.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years