Tomas Manzaneque-Garcia
at Univ de Castilla-La Mancha
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Bridges, Silicon, Electrodes, Aluminum nitride, Finite element methods, Microresonators, Sensors, Vibrometry, Resonators, Microelectromechanical systems

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