Dr. Tomasz Bieniek Profile

Dr. Tomasz Bieniek

at Institute of Electron Technology

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Author

Publications (4)

Proceedings Article | 10 November 2016

Innovative multi-cantilever array sensor system with MOEMS read-out

F. Ivaldi, T. Bieniek, P. Janus, P. Grabiec, W. Majstrzyk, D. Kopiec, T. Gotszalk

Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors

KEYWORDS: Signal to noise ratio, Laser sources, Electronics, Sensors, Calibration, Data acquisition, Head, Microopto electromechanical systems, Micromirrors, System integration

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Proceedings Article | 10 November 2016

Functionalization of MEMS cantilever beams for interconnect reliability investigation: development practice

T. Bieniek, G. Janczyk, R. Dobrowolski, K. Wojciechowska, A. Malinowska, A. Panas, M. Nieprzecki, H. Kłos

Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors

KEYWORDS: Microelectromechanical systems, Metals, Silicon, Reliability, 3D modeling, Plasma etching, Optimization (mathematics), Semiconducting wafers, Device simulation, Lead

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Proceedings Article | 25 July 2013

Silicon nanowires reliability and robustness investigation using AFM-based techniques

Tomasz Bieniek, Grzegorz Janczyk, Paweł Janus, Piotr Grabiec, Marek Nieprzecki, Grzegorz Wielgoszewski, Magdalena Moczała, Teodor Gotszalk, Elizabeth Buitrago, Montserrat Badia, Adrian Ionescu

Proc. SPIE. 8902, Electron Technology Conference 2013

KEYWORDS: Nanostructures, Biosensing, Silicon, Reliability, Atomic force microscopy, Scanning electron microscopy, Sensing systems, Field effect transistors, Nanolithography, Nanowires

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Proceedings Article | 25 July 2013

Manufacturing, measurement and control of MEMS / NEMS electrostatically driven structures

Magdalena Ekwińska, Piotr Kunicki, Tomasz Piasecki, Paweł Janus, Krzysztof Domański, Tomasz Bieniek, Piotr Grabiec, Teodor Gotszalk

Proc. SPIE. 8902, Electron Technology Conference 2013

KEYWORDS: Microelectromechanical systems, Silica, Polarization, Electrodes, Manufacturing, Control systems, Optical testing, Capacitance, Neodymium, Nanoelectromechanical systems

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