CONFERENCE PROCEEDINGS
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Dr. Tomasz Bieniek
at Institute of Electron Technology
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Author
Publications (4)
PROCEEDINGS ARTICLE | November 10, 2016
Innovative multi-cantilever array sensor system with MOEMS read-out
Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors
KEYWORDS: Signal to noise ratio, Laser sources, Electronics, Sensors, Calibration, Data acquisition, Head, Microopto electromechanical systems, Micromirrors, System integration
PROCEEDINGS ARTICLE | November 10, 2016
Functionalization of MEMS cantilever beams for interconnect reliability investigation: development practice
Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors
KEYWORDS: Microelectromechanical systems, Metals, Silicon, Reliability, 3D modeling, Plasma etching, Optimization (mathematics), Semiconducting wafers, Device simulation, Lead
PROCEEDINGS ARTICLE | July 25, 2013
Silicon nanowires reliability and robustness investigation using AFM-based techniques
Proc. SPIE. 8902, Electron Technology Conference 2013
KEYWORDS: Nanostructures, Biosensing, Silicon, Reliability, Atomic force microscopy, Scanning electron microscopy, Sensing systems, Field effect transistors, Nanolithography, Nanowires
PROCEEDINGS ARTICLE | July 25, 2013
Manufacturing, measurement and control of MEMS / NEMS electrostatically driven structures
Proc. SPIE. 8902, Electron Technology Conference 2013
KEYWORDS: Microelectromechanical systems, Silica, Polarization, Electrodes, Manufacturing, Control systems, Optical testing, Capacitance, Neodymium, Nanoelectromechanical systems
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