This paper presents issues related to the creation of research plates with titanium electrodes, which are a new alternative to currently used plates with gold electrodes. Methods for obtaining metallization of titanium, necessary for the production of electrodes are described. Various lithography techniques are presented for processing the obtained layer of the material. The stages of designing and manufacturing comb capacitors and ready-made research plates have been presented. Finally, substrates with a titanium layer have been designed and manufactured to allow the impedance of living cells to be measured.
This paper presents the design and simulation of four different structures of nichrome microheater on the polycarbonate substrate. Nichrome layer is covered by the silicon nitride dielectric layer. The comb capacitor covering dielectric layer is used for measuring electrical parameters of liquids. Designed structure allows impedance, resistance and capacitance monitoring of studied substances like chemical or biological liquids, which require constant heating value on the substrate surface. 3D model design and electro-thermal finite elements simulations were carried out by CoventorWare software. Various shapes of the heaters were studied to check the uniformity heating on the active surface.
The article presents the construction and technology of comb capacitors on a polycarbonate substrates. The structures have been designed to be used in the ECIS measurement system that allows monitoring the activity of the examined cells by analyzing the changing electrical parameters impedance, resistance and capacitance in real time. The copper layer was embedded by sputtering method. The resulting comb capacitors were used in a test sample of substances with different chemical properties.
MEMS actuators are currently widely used in the industry. Micro-heaters, being a prime example, attracted much attention in recent years due to their good operating parameters and low cost fabrication process. This paper focuses on a design and development of a micro-heater to be used as an actuator in a multiparametric capillary sensor. The micro-heater is an evolution of a previous design and uses a 200nm-thick thin film of 80/20 NiCr alloy as a heating layer. The paper presents results of fabrication and testing of the micro-heater, including temperature distribution and resistance changes during the heating cycle. Additionally, is presented a PWM based control system providing the stability of power and temperature distribution.
This paper presents analysis of mechanical strength and reliability of wire bonds in context of the applied bonding technique, wire material and substrate type used as well as bonding parameters. The investigation conducted includes a selection of parameters affecting process of effective wire bonds forming by 53XX F&K Delvotec Bonder and implementation of wire bonds with ultrasonic and thermosonic techniques, using various substrates combined with gold and aluminum 25 μm diameter wires. Furthermore, reliability and quality test made by bond pull technique have been presented and discussed.