Mr. Tomoaki Shibata
at Hitachi Chemical Co America Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 11, 1999
Proc. SPIE. 3796, Organic Nonlinear Optical Materials
KEYWORDS: Diffraction, Refractive index, Waveguides, Polarization, Polymers, Atomic force microscopy, Polymer thin films, Photorefractive polymers, Polymer multimode waveguides, Diffraction gratings

PROCEEDINGS ARTICLE | May 21, 1993
Proc. SPIE. 1805, Submicrometer Metallization: Challenges, Opportunities, and Limitations
KEYWORDS: Diffraction, Scattering, Annealing, Particles, Crystals, Copper, Ions, Silicon, Reliability, Aluminum

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