CONFERENCE PROCEEDINGS
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Tomoaki Shibata
at Hitachi Chemical Co America Ltd
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Publications (2)
Proceedings Article | 11 October 1999 Paper
Fabrication of refractive index grating into an azo-dye-attached EO polymer film by photobleaching
Toshiaki Hattori, Tomoaki Shibata, Shinji Onodera, Toshikuni Kaino
Proceedings Volume 3796, (1999) https://doi.org/10.1117/12.368290
KEYWORDS: Polymers, Refractive index, Polymer thin films, Diffraction gratings, Photorefractive polymers, Waveguides, Polarization, Diffraction, Atomic force microscopy, Polymer multimode waveguides
Proceedings Article | 21 May 1993 Paper
Giant-grain-copper metallization for high reliability and high-speed ULSI interconnects
Toshiyuki Takewaki, Takashi Hoshi, Tomoaki Shibata, Tadahiro Ohmi, T. Nitta
Proceedings Volume 1805, (1993) https://doi.org/10.1117/12.145461
KEYWORDS: Copper, Annealing, Ions, Aluminum, Diffraction, Scattering, Silicon, Reliability, Crystals, Particles
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