Dr. Tomofumi Miyauchi
at Renesas Technology Corp
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Polymers, Scanners, Coating, Photomasks, Chemical analysis, Critical dimension metrology, Fluorine, Photoresist processing, Semiconducting wafers

Proceedings Article | 30 June 2006
Proc. SPIE. 6270, Observatory Operations: Strategies, Processes, and Systems
KEYWORDS: Sensors, Calibration, Spectroscopy, X-rays, Spectral resolution, Bismuth, Charge-coupled devices, Manganese, X-ray imaging, CCD image sensors

Proceedings Article | 17 September 2005
Proc. SPIE. 5922, Hard X-Ray and Gamma-Ray Detector Physics VII
KEYWORDS: Visible radiation, Sensors, Photons, X-rays, Scintillators, Bismuth, Charge-coupled devices, X-ray telescopes, X-ray detectors, Hard x-rays

Proceedings Article | 11 October 2004
Proc. SPIE. 5488, UV and Gamma-Ray Space Telescope Systems
KEYWORDS: Cameras, Calibration, Spectroscopy, X-rays, Quantum efficiency, CCD cameras, Frequency modulation, Fermium, Charge-coupled devices, X-ray imaging

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