Tomohiro Morishita
at Asahi Kasei Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 8, 2014
Proc. SPIE. 8986, Gallium Nitride Materials and Devices IX
KEYWORDS: X-ray optics, Crystals, X-ray diffraction, Atomic force microscopy, Aluminum, Aluminum nitride, Crystal optics, Vapor phase epitaxy, Temperature metrology, Chemical mechanical planarization

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