Tomohiro Tsuchiya
at Kyushu Univ.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 February 2017
Proc. SPIE. 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
KEYWORDS: Luminescence, Silicon, Doping, Electroluminescence, Laser irradiation, Laser ablation, Diodes, Aluminum, Physical vapor deposition, Excimer lasers, Wet etching, Silicon carbide, Plasma treatment

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