Tomohiro Yoshida
Manager at Dai Nippon Screen Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 29, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Transparency, Quartz, Polymers, Water, Crystals, Absorbance, Immersion lithography, Fluorine, Standards development

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Mirrors, Light sources, Polarization, Spectroscopy, Silicon, Polarizers, Aspheric optics, Optical spectroscopy, Semiconducting wafers, Spectroscopes

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Transparency, Quartz, Polymers, Crystals, Polymerization, Photomasks, Immersion lithography, Fluorine, Standards development

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