Tomoyuki Matsuyama
Manager at Nikon Corp
SPIE Involvement:
Author
Publications (56)

Proceedings Article | 20 March 2019
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Actuators, Reticles, Calibration, Scanners, Wavefronts, Control systems, Deformable mirrors, Distortion, Feedback control, Automatic control

Proceedings Article | 18 March 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Lithography, Diffraction, Finite-difference time-domain method, Optical lithography, Lithographic illumination, Wavefronts, Computer simulations, 3D modeling, Projection systems, Photomasks

Proceedings Article | 18 March 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Lithography, Data modeling, Scanners, Photomasks, Optical simulations, Immersion lithography, Optical proximity correction, Critical dimension metrology, Photoresist processing, Performance modeling

Proceedings Article | 18 March 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Lithography, Metrology, Atrial fibrillation, Calibration, Scanners, Time metrology, Feedback loops, Semiconducting wafers, Yield improvement, Overlay metrology

Proceedings Article | 31 March 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Reticles, Sensors, Ions, Control systems, Distortion, Printing, Image sensors, Optical scanning, Immersion lithography

Showing 5 of 56 publications
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