Dr. Tong Zhang
Sr. Member Technical Staff at
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Nanoimprint lithography, Liquids, Lithography, Coating, Deposition processes, Silicon, Self-assembled monolayers, Photoresist processing, Process control, Plasma

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