Torsten Harzendorf
Research and process engineer at Fraunhofer Institute - IOF
SPIE Involvement:
Area of Expertise:
Photo and electron beam lithography , SEM FIB AFM characterization , Microoptical technologies
Publications (14)

Proceedings Article | 13 December 2020 Presentation + Paper
Proceedings Volume 11451, 114511D (2020)
KEYWORDS: Polarization, Diffraction gratings, Optics manufacturing, Optical design, Crystals, Diffraction, Silicon, Earth's atmosphere, Spectroscopic atmospheric monitoring techniques, Spectral resolution

Proceedings Article | 19 February 2020 Paper
Dirk Michaelis, Axel Bodemann, Peter Schreiber, Torsten Harzendorf, Stephanie Fischer, Ralf Rosenberger
Proceedings Volume 11310, 113100M (2020)
KEYWORDS: Mirrors, RGB color model, Image analysis, Refraction

Proceedings Article | 6 September 2018 Presentation + Paper
Proceedings Volume 10706, 1070621 (2018)
KEYWORDS: Diffraction gratings, Lithography, Diffraction, Electron beam lithography, Chromium, Binary data, Optical design, Polarization, Etching, Tolerancing

Proceedings Article | 22 July 2016 Paper
T. Flügel-Paul, G. Kalkowski, T. Benkenstein, T. Harzendorf, A. Matthes, U. Zeitner
Proceedings Volume 9912, 99122A (2016)
KEYWORDS: Diffraction gratings, Diffraction, Polarization, Coating, Silica, Spectrometers, Atomic layer deposition, Near infrared, Manufacturing, Refractive index

Proceedings Article | 2 May 2014 Paper
Proceedings Volume 9130, 91300Y (2014)
KEYWORDS: Nanostructures, Electron beam lithography, Antireflective coatings, Diffraction gratings, Electron beams, Nanolithography, Etching, Silica, Chromium, Reactive ion etching

Showing 5 of 14 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top