Mr. Torsten Kiessling
at Fraunhofer IPMS
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 24, 2004
Proc. SPIE. 5346, MOEMS and Miniaturized Systems IV
KEYWORDS: Oxides, Mirrors, Beam splitters, Etching, Electrodes, Silicon, Electroluminescence, Micromirrors, Semiconducting wafers, Adhesives

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