We present the latest progress on the industrial scale coating facility for the Advanced Telescope for High-ENergy Astrophysics (ATHENA) mission. The facility has been successfully commissioned and tested, completing an important milestone in preparation of the Silicon Pore Optics (SPO) production capability. We qualified the coating facility by depositing iridium and boron carbide thin films in different configurations under various process conditions including pre-coating in-system plasma cleaning. The thin films were characterized with X-Ray Reectometry (XRR) using laboratory X-ray sources Cu K-α at 8.048 keV and PTB's four-crystal monochromator beamline at the synchrotron radiation facility BESSY II in the energy range from 3.6 keV to 10.0 keV. Additional X-ray Photoelectron Spectroscopy (XPS) measurements were performed with Al K-α radiation to analyze the composition of the deposited thin films.
The LSST Coating Plant consists of a Coating Chamber for high reflective optical coatings deposition and a Cleaning and Stripping Station for the M1M3 and M2 mirrors. The Coating Chamber sputtering process will be capable of depositing bare and protected Silver/Aluminum coating recipes. The Cleaning and Stripping Station consists of a rotating washing/drying boom, perimeter platforms, and an effluent handling system within the M1/M3 mirror cell. This paper describes the status of the Coating Plant construction effort at the Von Ardenne and MAN facilities. Progress on factory testing, review of the design features and reflective/coating requirements, and results are presented.