Dr. Toru Fujii
Manager at Nikon Corp
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | March 4, 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Lithography, Jones matrices, Polarization, Birefringence, Sensors, Calibration, Wavefronts, Optical testing, Projection systems, Singular optics

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Polarization, Birefringence, Signal attenuation, Matrices, Crystals, Wavefronts, Optical testing, Projection systems, Optical simulations

PROCEEDINGS ARTICLE | March 7, 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Lithography, Polarization, Matrices, Wavefronts, Adaptive optics, Optical testing, Projection systems, Integrated optics, Phase measurement, Fiber optic illuminators

PROCEEDINGS ARTICLE | March 27, 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Lithography, Jones matrices, Optical lithography, Polarization, Birefringence, Signal attenuation, Matrices, Crystals, Wavefronts, Projection systems

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Polarization, Sensors, Calibration, Scanners, Inspection, Wavefront sensors, Wavefronts, Optical testing, Integrated optics, Charge-coupled devices

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Light sources, Digital signal processing, Polarization, Calibration, Scanners, Wave plates, Polarimetry, Excimers, Polarization control, Fiber optic illuminators

Showing 5 of 8 publications
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