Dr. Toru Suzuki
at Gigaphoton Inc
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Temporal coherence, Lithography, Light sources, Speckle, Spatial coherence, Double patterning technology, Immersion lithography, Critical dimension metrology, Line edge roughness, Laser optics

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Light sources, Optical amplifiers, Oscillators, High power lasers, Reliability, Laser applications, Excimer lasers, Double patterning technology, Immersion lithography, Fluorine

Proceedings Article | 11 April 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Light sources, Oscillators, High power lasers, Error analysis, Laser applications, Laser development, Power supplies, Laser stabilization, Excimer lasers, Double patterning technology

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Light sources, Metrology, Spectroscopy, High power lasers, Reliability, Laser applications, Laser development, Laser stabilization, Immersion lithography, Semiconducting wafers

Proceedings Article | 26 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Lithography, Light sources, Scanners, Spectroscopy, Laser applications, Laser development, Excimer lasers, Immersion lithography, Optical proximity correction, Critical dimension metrology

Proceedings Article | 15 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Optical components, Lithography, Light sources, Resonators, Electrodes, Reliability, Magnetism, Amplifiers, Gas lasers, Excimer lasers

Showing 5 of 18 publications
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